cmp retainer rings
Meldin® brad CMP retaining rings are engineered to improve your yield and productivity by employing the latest in advanced materials technologies. Darcoid works with Saint-Gobain whose Meldin® brand retaining rings are proven to last up to six times longer than PPS rings, maximizing machine up-time and reducing cost of ownership.
In addition to extended life, Meldin® rings also offer superior Within Wafer Non-Uniformity (WIWNU) over PPS rings, as well as significantly improved inner wear resistance. Actual fab results indicate that Meldin® rings offer improved inner groove wear resistance of up to 30% over PPS rings.
Saint-Gobain offers standardized retaining ring designs for all major OEM machines, and can readily customize rings to your exact specifications. In addition, through our unique manufacturing capabilities, Saint-Gobain controls the entire process from raw resin to completed product, providing unparalleled quality and reliability.
Features & Benefits
• Extended ring life
• Increased machine up-time
• Reduces CMP cost per wafer
• Improved Within Wafer Non-Uniformity (WIWNU)
• Superior wafer edge performance
• High dimensional stability
• Rapid break-in time
• Drop-in replacement for OEM retaining rings
• Low particle generation
• Wear properties can be customized
• Existing designs for all OEM machines
• Designs can be customized to your process
• Class 100 clean room washed and packaged
• Resistant to a broad range of chemicals
• Excellent cost/performance balance
