Within critical semiconductor vacuum environments, KF centering ring seal assemblies must maintain a reliable, effective vacuum seal. In order to assure maximum seal performance, O-rings on these assemblies must provide low compression set and high retained resiliency. Parker’s full range of KF type centering rings are available in standard ISO sizes assembled with Parker O-ring materials commonly used in semiconductor wafer processing systems. A variety of material choices are available in stainless steel or aluminum centering ring assemblies. O-ring materials are available in nitrile, (for moderate temperature), fluorocarbon (for moderate chemistries up to 400°F) and Parofluor ULTRATM perfluorinated elastomers (for high purity, aggressive chemistries and temperatures up to 608°F).

Parker Advantages
• Leading technology in O-ring elastomer materials
• Excellent compression set resistance
• Broadest range of materials offering
• High performance physical properties
• Parker’s total batch control and traceability of O-rings
• Application engineering assistance
• Local stocking distributor and Parker Service Center (PSC) network
• Clean room packaging available on request
• Total sealing product solutions

		Available Standard O Ring Materials			Centering Ring Assembly

Thermal Stability of Semiconductor Elastomers
The temperature limits assigned to compounds in this table are offered as guidelines only, and are dependent upon the application and the specified Parker compound


Total System Solutions:  Parker’s Seal Group offers a complete line of O-rings, custom molded shapes, composite (rubber/metal and rubber/plastic) seals, PTFE and thermoplastic seals, bumpers, dust covers, diaphragms, isolators, washers and thermoset injection molded boots and bellows, as well as a complete line of thermally and/or electrically conductive materials for a wide variety of applications. Parker’s “total systems sealing” approach can help customers reduce costs and improve efficiency.