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parofluor & parofluor ultra - parker compounds


  • Compound Information
  • Literature
Parker Compound
Elastomer
Hardness Shore A
Applications
Color
Temp °F (°C)
Parofluor Ultra (FFKM)
FFKM
65
High Purity, low closure force for static sealing,  excellent continuous high temp stability, compression set resistance & mechanical properties. Broad chemical resistance for wet and dry processes.
White
600°F (316°C)
FFKM
75
Acid Resistant 
Black
525°F (260°C)
FFKM
75
High Temp, Low Compression Set, Chemical resistance, RTP, Oxidation, diffusion, LPCVD
Black
608°F (320°C)
FFKM
75
High Purity, High Temp, Low Compression Set, Plasma & Gas deposition, Etching, Ashing, PVD, CVD, ALD, HDPCVD, PECVD, RTP, Oxidation, diffusion, thermal, LPCVD
White
600°F (316°C)
FFKM
75
Clean, Improved O2 Plasma resistance, High Temp, Low Compression set, Plasma & Gas deposition, Etching, Ashing, PVD, CVD, ALD, HDPCVD, PECVD, RTP, Oxidation, diffusion, thermal, LPCVD
White
600°F (316°C)
FFKM
75
High Purity, High Temp, Low Compression Set, low outgassing, broad chemical resistance, RTP, Oxidation, diffusion, thermal, LPCVD
White
600°F (316°C)
FFKM
75
Non-filled High Purity, low extractable, Minimum particles, High Temp, low compression set (no fillers), Plasma & Gas deposition, Etching, Ashing, PVD, CVD, ALD, HDPCVD, PECVD
Opaque - Black
572°F (300°C)
FFKM
75
Broad Chemical Resistance, outstanding compression set resistance, wet processes, wet etching, copper palting, photolithography, surface prep, cleaning, rinse
Black
525°F (260°C)
FFKM
90
High Temp, Low Compression Set, Chemical resistance
Black
608°F (320°C)
Parofluor (FFKM)
FFKM
65
Plasma, Low Closure Force
White
572°F (300°C)
FFKM
75
High Temperature, FDA
Black
572°F (300°C)
FFKM
75
Low Leachables, FDA
White
572°F (300°C)
FFKM
90
Plasma, Low Outgassing
White
572°F (300°C)
FFKM
90
Plasma, Low Outgassing
Black
536°F (280°C)


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Parofluor & Parofluor Ultra, Parker Compounds, Semiconductor Compounds
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